Requirement on Air Filter Media for Semi-Conductor Industry in Japan and High Performance Air Filter Media, 1997 Nonwovens Conference Proceedings

Quality improvements of air filters and air filter media are in serious demand for high integration, high density and energy saving for particulate removal of semi-conductors. This paper refers to recent demands in respect to particulate removal techniques and filters in the Japanese semi-conductor industry, especially to our techniques for manufacturing air filter media of high performance.

Author: Soyama, T.
Requirement on Air Filter Media for Semi-Conductor Industry
Requirement on Air Filter Media for Semi-Conductor Industry in Japan and High Performance Air Filter Media, 1997 Nonwovens Conference Proceedings
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